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Browsing by Author Lattner, E.
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Issue Date
Title
Author(s)
2020
Phase formation and high-temperature stability of very thin co-sputtered Ti-Al and multilayered Ti/Al films on thermally oxidized si substrates
Seifert, M.
;
Lattner, E.
;
Menzel, S.B.
;
Oswald, S.
;
Gemming, T.
