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Browsing by Author Wagner, Günther
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Showing results 1 to 1 of 1
Issue Date
Title
Author(s)
2003
Technologie- und Verfahrensentwicklung zur Abscheidung von p-Siliziumkarbid nach dem Chemical Vapour Deposition (CVD)-Verfahren : Abschlußbericht
Wagner, Günther
;
Doerschel, J.
;
Irmscher, K.
;
Leitenberger, W.
;
Lux, Krist. B.
;
Roßberg, M.
