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Title: Laser Embossing of Micro-and Submicrometer Surface Structures in Copper
Authors: Ehrhardt, M.Lorenz, P.Frost, F.Zimmer, K.
Publishers Version: https://doi.org/10.1016/j.phpro.2012.10.095
Issue Date: 2012
Published in: Physics Procedia Vol. 39 (2012)
Publisher: Amsterdam [u.a.] : Elsevier
Abstract: Micro- and submicrometer structures have been transferred from nickel foils into solid copper surfaces by laser microembossing. The developed arrangement for laser microembossing allows a large-area replication using multi- pulse laser scanning scheme, guaranties a low contamination of the embossed surface and enables the utilization of thick workpieces. In the micrometer range the replicated patterns feature a high accuracy regarding the shape. A significant difference between the master and the replication pattern could be observed for the laser embossing of submicrometer patterns. In conclusion, the results show that the proposed laser embossing process is a promising method with a number of applications in microengineering.
Keywords: Copper; Embossing; Laser; Metal; Micro; Replication; Submicro patterns
DDC: 620
License: CC BY-NC-ND 3.0 Unported
Link to License: https://creativecommons.org/licenses/by-nc-nd/3.0/
Appears in Collections:Ingenieurwissenschaften



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