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Issue Date
Title
Author(s)
2020
Phase formation and high-temperature stability of very thin co-sputtered Ti-Al and multilayered Ti/Al films on thermally oxidized si substrates
Seifert, M.
;
Lattner, E.
;
Menzel, S.B.
;
Oswald, S.
;
Gemming, T.
2020
High temperature behavior of rual thin films on piezoelectric CTGS and LGS substrates
Seifert, M.
Discover
Author
2
Seifert, M.
1
Gemming, T.
1
Lattner, E.
1
Menzel, S.B.
1
Oswald, S.
Subject
2
Annealing
2
Binary alloys
2
High temperature stability
2
Oxidation
2
Silica
2
Substrates
2
Thin films
1
Acoustic surface wave devices
1
Aluminum alloys
1
Aluminum nitride
.
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Date issued
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2020
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